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Research Facility
Device Fabrication Lab 
The MPL has excellent capabilities and
noteworthy experience for the fabrication of microdevices. Our mask
aligner provides nearly 1um tolerance of image transfer on the
semiconductor surface. For the evaporation of metals and
insulators, both electron beam and sputtering systems are
available.
The MPL is currently engaged in the fabrication of MCT-based infrared
detector arrays. Our interests include the fabrication of test structures
to study in detail the various limiting current mechanisms involved in
the device, p on n medium wavelength infrared (MWIR), long wavelength
infrared (LWIR) staring detector arrays, arrays for high temperature
(> 120 K) operation, and arrays for multi-color detection. Currently,
the facilities at the
Microfabrication Applications
Laboratory (MAL),
at the
Department of Electrical Engineering
and Computer Science,
is being used for the fabrication of devices. This is because the clean
room and fabrication facilities of the MPL are currently being
renovated. The device fabrication and characterization facilities at
the MPL include:
- Mask Aligner
- Photoresist Spinner
- Evaporation Systems
- Sputtering System
- Electron Beam Evaporation Unit
- Bonder
- I-V, C-V Setup
-
Spectral Response Measurement System
Contact:
Dr. Renganathan Ashokan,
ashokan@uic.edu.
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