MPL Logo - Click on this logo to go back to the cover page MPL Owl
 
Research Facility
Evaporation System


Function: The sputtering system and the electron beam evaporation unit allow depositing of metal films for contacts or depositing insulating films of ZnS.

Specifications: The evaporation systems can be operated in either D. C. or R. F. mode.

Contact: Dr. Renganathan Ashokan, ashokan@uic.edu.


Facilities

Laboratory Equipment List:

Materials Growth

 Opus 45 MBE system
 MBE Cluster Tool system
 Riber-32 MBE system
 Riber-EPI MBE system

Materials Characterization

 Scanning Electron Microscope
 Hall measurement system
 Ellipsometry System
 The Auger System
 Vacuum Electro-Reflectance
 Photoluminescence
 Other Equipments

Device

 Device Fabrication
 Mask Aligner
 Photoresist Spinner
 Evaporation Systems
 Bonder
 I-V, C-V Setup
 Spectral Response
© 2000
Microphysics Laboratory
University of Illinois at Chicago