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Research Facility
at Microphysics Lab


Molecular Beam Epitaxy Machine



Microphysics laboratory has a wide variety of state-of-the-art research tools to conduct study in semiconductor materials growth, characterization and modeling. Semicondutor heterostructures can be made with materials such as HgCdTe, ZnSe and related wide gap II-VI materials and III-V semiconducting materials. Microphysics lab has Various molecular beam epitaxy systems to grow materials on substrates such as GaAs and Si. Novel deposition techniques are employed to fabricate semiconducting alloys, superlattices and quantum dot structures. Laboratory facilities are also available to characterize and fabricate electronic and electro-optic devices.


Facilities

Laboratory Equipment List:


Materials Growth

 Opus 45 MBE system
 MBE Cluster Tool system
 Riber-32 MBE system
 Riber-EPI MBE system

Materials Characterization

 Scanning Electron Microscope
 Hall measurement system
 Ellipsometry System
 The Auger System
 Vacuum Electro-Reflectance
 Photoluminescence
 Other Equipments

Device

 Device Fabrication
 Mask Aligner
 Photoresist Spinner
 Evaporation Systems
 Bonder
 I-V, C-V Setup
 Spectral Response

© 2000
Microphysics Laboratory
University of Illinois at Chicago