MPL Logo - Click on this logo to go back to the cover page MPL Owl
 
Research Facility
Hall measurement system



Function: The Hall measurement system is capable of measuring resistivity, carrier concentration and mobility of semiconductors over a wide range of temperatures and magnetic field strengths.Hall-Click to enlarge this picture Studies of Hall coefficient versus temperature and magnetic field yield a wealth of information about the semiconductor sample:
  • Carrier freeze out
  • Two-dimensional electron gas (very useful for the characterization of various interfaces)
  • Crossovers in conductivity
Accurate values of carrier concentration and mobility of each Molecular Beam Epitaxy grown layer is measured using this system and hence provides the vital feedback loop to standardize the growth conditions of MBE layers for various different applications such as:
  • Medium wavelength infrared (MWIR)
  • Long wavelength infrared (LWIR)
  • Multi-color detector arrays
Fundamental information, such as the activation energy of dopants, is also obtained using these measurements.

Specifications: The Hall measurement system is capable of measuring over a wide range of conditions:

Temperature: 300 K to 4 K
Magnetic field strength: 0 to 1.5 Tesla

Three samples can be measured simultaneously in Van der Pauw geometry and the measurement is completely automated. The low temperature is achieved by a closed-cycle helium system (CF200, from Oxford Instruments). The voltages are accurately measured using Keithley products: a Model 220 programmable current source and a Model 195 voltmeter. A Model 706 scanner from Keithley, along with two Model 7056 general purpose scanner cards per sample, are used to eliminate any unwanted voltages arising due to misalignment of contacts and sample inhomogeneity.


Facilities

Laboratory Equipment List:


Materials Growth

 Opus 45 MBE system
 MBE Cluster Tool system
 Riber-32 MBE system
 Riber-EPI MBE system

Materials Characterization

 Scanning Electron Microscope
 Hall measurement system
 Ellipsometry System
 The Auger System
 Vacuum Electro-Reflectance
 Photoluminescence
 Other Equipments

Device

 Device Fabrication
 Mask Aligner
 Photoresist Spinner
 Evaporation Systems
 Bonder
 I-V, C-V Setup
 Spectral Response

© 2000
Microphysics Laboratory
University of Illinois at Chicago