Research Facility
OPUS MBE System
Facilities
Laboratory Equipment List:
Materials Growth
Opus 45 MBE system
MBE Cluster Tool system
Riber-32 MBE system
Riber-EPI MBE system
Materials Characterization
Scanning Electron Microscope
Hall measurement system
Ellipsometry System
The Auger System
Vacuum Electro-Reflectance
Photoluminescence
Other Equipments
Device
Device Fabrication
Mask Aligner
Photoresist Spinner
Evaporation Systems
Bonder
I-V, C-V Setup
Spectral Response
© 2000
Microphysics Laboratory
University of Illinois at Chicago
