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Research Facility
Other Equipment



X-ray Machines

An X-ray double crystal diffractometry machine is primarily used to measure the FWHM of the DCRC which determines the crystalinity of MBE grown films. Also available is an X-ray topography machine for the structural defects and strain effects in substrates and MBE films.

Electrical Characterization

The electrical characterization equipment at UIC includes:

  • a programmable electrometer,
  • a multi-frequency LCR meter,
  • a low temperature probe station,
  • and a temperature controller.

Transport Measurements

Transport measurements of semi-metals and wide gap semi-insulating semiconductors can be performed with or without magnetic fields. This facility can measure up to three samples per run and can take them to a temperature as low as 4.2K. Some characteristics that are measured are:

  • majority carrier information,
  • multi-band effects,
  • and photo-hall.

Lifetime Measurement

The photoconductive lifetime measurement facility at MPL consists of:

  • a pulsed GaAlAs laser,
  • a liquid nitrogen cryostat,
  • a pre-amplifier,
  • and a digitizing oscilloscope.

Facilities

Laboratory Equipment List:


Materials Growth

 Opus 45 MBE system
 MBE Cluster Tool system
 Riber-32 MBE system
 Riber-EPI MBE system

Materials Characterization

 Scanning Electron Microscope
 Hall measurement system
 Ellipsometry System
 The Auger System
 Vacuum Electro-Reflectance
 Photoluminescence
 Other Equipments

Device

 Device Fabrication
 Mask Aligner
 Photoresist Spinner
 Evaporation Systems
 Bonder
 I-V, C-V Setup
 Spectral Response

© 2000
Microphysics Laboratory
University of Illinois at Chicago