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Research Facility
Scanning Electron Microscope



This Scanning Electron Microscope (SEM) features 5nm resolution. It is used for the study of surface morphology and the determination of the thickness of MBE grown films.SEM- Click to enlarge this picture A variety of accessories are also attached to SEM to facilitate semiconductor characterizations including:

  • Energy Dispersive Analysis,
  • X-ray, Electron Beam Induced Current,
  • Electron Beam Channeling, and
  • Cathode-luminescence measurements

Facilities

Laboratory Equipment List:


Materials Growth

 Opus 45 MBE system
 MBE Cluster Tool system
 Riber-32 MBE system
 Riber-EPI MBE system

Materials Characterization

 Scanning Electron Microscope
 Hall measurement system
 Ellipsometry System
 The Auger System
 Vacuum Electro-Reflectance
 Photoluminescence
 Other Equipments

Device

 Device Fabrication
 Mask Aligner
 Photoresist Spinner
 Evaporation Systems
 Bonder
 I-V, C-V Setup
 Spectral Response

© 2000
Microphysics Laboratory
University of Illinois at Chicago