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Research Facility Scanning Electron Microscope
This Scanning Electron Microscope (SEM)
features 5nm resolution. It is used for the study of
surface morphology and the determination of the thickness of
MBE grown films. A variety of accessories are also attached to SEM
to facilitate semiconductor characterizations including:
- Energy Dispersive Analysis,
- X-ray, Electron Beam Induced Current,
- Electron Beam Channeling, and
- Cathode-luminescence measurements
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