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Research Facility
Spectral Response Measurement System




Function: The spectral response measurement system allows measurement of the spectral response. By making this measurement, the cut-off wavelength of the infrared detectors can be determined. The system is being augmented to allow measurement of the quantum efficiency of the infrared detectors.

Specifications: This system consists of a low temperature attachment (a J-T cooler with an optical window) to a Fourier Transform Infrared (FTIR) spectrometer.

Fourier Transform Infrared (FTIR) spectrometer

An FTIR (Fourier Transform Infrared) spectrometer is used to determine the infrared absorption, the index of refraction and the thickness of the material.

A personal computer is being used currently to control and collect data from this unit with outstanding efficiency.

Contact: Dr. Renganathan Ashokan, ashokan@uic.edu.




Facilities

Laboratory Equipment List:


Materials Growth

 Opus 45 MBE system
 MBE Cluster Tool system
 Riber-32 MBE system
 Riber-EPI MBE system

Materials Characterization

 Scanning Electron Microscope
 Hall measurement system
 Ellipsometry System
 The Auger System
 Vacuum Electro-Reflectance
 Photoluminescence
 Other Equipments

Device

 Device Fabrication
 Mask Aligner
 Photoresist Spinner
 Evaporation Systems
 Bonder
 I-V, C-V Setup
 Spectral Response

© 2000
Microphysics Laboratory
University of Illinois at Chicago