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Research Facility
Photoresist Spinner



Specifications: The photoresist spinner has five parts:Photoresist spinner
  1. A 5.5" (13.97 cm) stainless steel bowl.
  2. An EC motor with a controller.
  3. A dual function foot switch.
  4. A vacuum interlock protection, which ensures the samples are not damaged.
  5. A front-panel digital display showing the time and speed setting.
The speed may vary from 50 to 10000 rpm.

The accessories include different vacuum chucks to accommodate samples of sizes varying from a few millimeters to three inches (7.62 cm).

This spinner was manufactured by Headway Research, Inc. Its model number is EC101DT-R485.

Contact: Dr. Renganathan Ashokan, ashokan@uic.edu.


Facilities

Laboratory Equipment List:


Materials Growth

 Opus 45 MBE system
 MBE Cluster Tool system
 Riber-32 MBE system
 Riber-EPI MBE system

Materials Characterization

 Scanning Electron Microscope
 Hall measurement system
 Ellipsometry System
 The Auger System
 Vacuum Electro-Reflectance
 Photoluminescence
 Other Equipments

Device

 Device Fabrication
 Mask Aligner
 Photoresist Spinner
 Evaporation Systems
 Bonder
 I-V, C-V Setup
 Spectral Response

© 2000
Microphysics Laboratory
University of Illinois at Chicago