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Highly uniform HgCdTe layers grown on three-inch Si wafers.

Research Note:

figure 1 Molecular Beam Epitaxy (MBE) was used to deposite mercury cadmium telluride (HgCdTe) films that are responsive to the mid-wave region of the infrared radiation. As a step towards the development of very large infrared diode arrays, these layers were grown on three-inch silicon wafers. These layers exhibited very uniform lateral composition profile, a major bottle-neck in achieving large area HgCdTe substrates.
figure 2 These layers were used to form p on n planar architecture for MWIR device fabrication. X-ray diffraction (full width at half maximum (FWHM) = 120 arc sec), Hall (electron concentration and mobility in the absorber layer, 1x1015 cm-3 and 5x104 cm2/V-s), and photoconductive lifetime measurements at 80 K (hole lifetime in the absorber layer = 1.18 msec) have been measured. The diode results indicate that these material are of state-of-the-art HgCdTe layers grown on large Si wafers.

Research

© 2000
Microphysics Laboratory
University of Illinois at Chicago