Objectives

Microelectronic Materials and Processing

Our group's major thrust is on relationships among processing, properties and structures as well as the development of new materials and processes. Objectives include novel substrate surface cleaning techniques, kinetics and surface chemistry of reaction processes on silicon substrate surfaces, controlled production of thin heterostructure layers, and design of new material systems for fabrication of group IV-based optical, electronic and micro-electro-mechanical systems. Specific systems of interest include silicon selective epitaxial growth, silicon-germanium growth, ultra thin silicon oxynitride films, and in-situ probing of surface chemical phenomena during the thin film growth of microelectronic materials.

Heterogeneous Catalysis and Surface Chemistry

Our group's thrust is the emergence of a basic new understanding of several key catalytic processes on transition metal and other surfaces at high gas pressures. Time-resolved in situ surface-enhanced Raman spectra of adsorbed species on a subsecond/seconds time scale coupled with in situ infrared spectra, reaction rate measurements in transient experiments (with or without isotopes) and ex situ spectroscopic information are used to obtain hitherto unavailable information concerning the nature, role and kinetic significance of reaction intermediates and adsorbed species in heterogeneous catalytic systems at high gas pressures. Specific reaction systems of interest include partial oxidations of olefins and other small organic molecules, selective hydrogenations, and nitric oxide reduction by CO or H₂ on several catalysts.

News

	Manish receives receives the University of Tennessee Travel Grant for attending the NSF CMMI 2009 Research and Innovation Conference.
	Deepthi defends her PhD thesis - Sep 05 '08
	Directing the Research Experiences for Undergraduates (REU) Program Summer REU-NSF Fellowship Program for 2008
	Prodyut defends his PhD thesis - April 03 '08
	Yi Yang receives the University of Tennessee Travel Grant for attending the NSF CMMI 2008 Research and Innovation Conference.
	Co-Directing the Chicago Science Teachers Research Program Research Experiences for Teachers (RET) NSF Fellowship Program for 2007
	Participant and contributing member of the Center for Authentic Science Practice in Education (CASPiE)

Group Meetings

	April30-Yi
	April22-Pang-Yu
	April10-Qian
	April1-Max
	Mar4 - Yi
	Feb25 - Qian, Rechael
	Feb11 - Qin, Jie
	Jan 14 - Julie
	Dec19 - Runshen
	Dec3 - Max, Rachael
	Nov11 - Lin, Yi
	Oct 21 - Lin
	Oct 16 - Runshen
	Oct 15 - Qian
	Oct 02 - Jie, Homa
	Sep 22 - Lin
	Sep 03 - Howie, Deepthi
	Aug 18 - Howie
	Aug 08 - Jie
	Aug 01 - Qin, Manish, Greg
	more ...