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Atomic Layer Deposition reactor |
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Rapid Thermal Processing/Chemical Vapor Deposition System |
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Copper Catalytic Reactor |
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3-zone Quartz Oxidation/Nitridation/Oxynitridation Furnace, Lindberg/Blue |
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Single-zone Quartz Oxidation/Nitridation/Oxynitridation Furnace, Varian |
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200 amu Mass Spectrometers, Stanford Research Systems (Two) |
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Spectral Ellipsometer, J.A. Woollam Co. M-44 |
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UV Ozone Generation-cum-Monitoring System |
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Fourier Transform Infrared Spectrometer, Nicolet |
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Goniometer, Rame'-Hart NRL CA Goniometer (M#100-0, S#2067). |
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Pyrometer, Research Inc. |
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Nanospectrometer, Nanometrics |
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Wafer Surface Viewing Optical Microscope |
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Ultrasonic Wafer Cleaning System, Branson |
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Atomic Absorption Spectrometer, Perkin Elmer |
