Facilities

Advanced Materials Research Laboratory

AMReL is equipped with the following:

  • Atomic Layer Deposition reactor
  • Rapid Thermal Processing/Chemical Vapor Deposition System
  • Copper Catalytic Reactor
  • 3-zone Quartz Oxidation/Nitridation/Oxynitridation Furnace, Lindberg/Blue
  • Single-zone Quartz Oxidation/Nitridation/Oxynitridation Furnace, Varian
  • 200 amu Mass Spectrometers, Stanford Research Systems (Two)
  • Spectral Ellipsometer, J.A. Woollam Co. M-44
  • UV Ozone Generation-cum-Monitoring System
  • Fourier Transform Infrared Spectrometer, Nicolet
  • Goniometer, Rame'-Hart NRL CA Goniometer (M#100-0, S#2067).
  • Pyrometer, Research Inc.
  • Nanospectrometer, Nanometrics
  • Wafer Surface Viewing Optical Microscope
  • Ultrasonic Wafer Cleaning System, Branson
  • Atomic Absorption Spectrometer, Perkin Elmer
  • UV Ozone Generation-cum-Monitoring System
  • UV Ozone Generation-cum-Monitoring System

Besides, we are highly associated with UIC's two major research facilities: